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Paper   IPM / Physic / 8580
School of Physics
  Title:   Numerical Analysis of Ion-Implantation in Target with A Rectangular Groove
  Author(s): 
1.  H. Ghomi
2.  M. Sharifian
3.  B. Shokri
  Status:   Published
  Journal: Vacuum
  Vol.:  81
  Year:  2007
  Pages:   1292-1295
  Supported by:  IPM
  Abstract:
Ion dynamics of pulsed plasma sheath during the plasma source ion-implantation (PSII) affects the resultant surface properties and structures. In this work, a two-dimensional fluid model is applied to the problem of computing ion dynamics in the sheath of a target with a rectangular groove. The evolution of sheath edge, x and y components of ion velocity on the target surface are simulated to describe the physics of sheath in PSII.

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