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“School of Physic”

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Paper   IPM / Physic / 8405
School of Physics
  Title:   Effects of Potential and Duration of Pulse Width on Sheath Dynamics Related to A Target with A Groove in Two-Dimensional Simulation
  Author(s): 
1.  H. Ghomi
2.  M. Sharifian
3.  R. Niknam
4.  B. Shokri
  Status:   Published
  Journal: J. Appl. Phys.
  No.:  11
  Vol.:  100
  Year:  2006
  Pages:   113301
  Supported by:  IPM
  Abstract:
In this paper, the temporal evolution of the ion-matrix sheath near a target with a rectangular groove as a function of time and potential is investigated numerically. A two-dimensional model with a single groove is adopted. The profiles of potential, ion density, and the normalized ion flux over the sidewall and the floor of the groove

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