“School of Nano-Sciences”
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| Paper IPM / Nano-Sciences / 16914 |
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Fresnel diffractometry using a phase step, comparable to interferometry, has led to several high-precision metro- logical applications. Either in theoretical investigations or in the applications, the phase step is considered to be sharp. However, practically, fabrication of such elements is impossible and a level of bluntness is unavoidable. In this paper, we address the effect of edge sharpness on phase-step diffractometry. We show, theoretically and with simulations, that if the conjunction length is less than approximately 10
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