IPM Calendar 
Friday 26 April 2024   Today  
Events for day: Monday 29 August 2022    
           09:00 - 13:00     China-Iran Seminar On Lie and Representation Theory
School
ISFAHAN BRANCH OF MATHEMATICS



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           11:00 - 12:00     Journal Club: Experiment & Phenomenology – meeting
Molecular dynamics simulation of temperature effects on the deposition of Cu film on Si by magnetron sputtering

School
PARTICLES AND ACCELERATORS

Abstract:

The temperature effects on the growth of Cu thin film on Si (001) in the context of magnetron sputtering deposition were systematically studied using molecular dynamics (MD) method. To improve the comparability of simulation results at varying temperatures, the initial status data of incident Cu atoms used in all simulations were read from an identical file via LAMMPS-Python interface. In particular, crystalline microstructure, interface mixing and internal stress of Cu thin film deposited at different temperatures were investigated in detail. With raising the substrate temperature, the interspecies mixed volume and ...